中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
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CAS IR Grid
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上海微系统与信息技术... [3]
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期刊论文 [9]
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Enhancing removal of hydrogen from granular polysilicon by innovating vacuum separation model and method for SoG-Si
期刊论文
OAI收割
SOLAR ENERGY, 2022, 卷号: 241, 页码: 492-503
作者:
Wu, Zhiliang
;
Qian, Guoyu
;
Wang, Zhi
;
Wang, Dong
;
Ma, Wenhui
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Dopant diffusion through ultrathin AlOx and AlOx/SiOx tunnel layer in TOPCon structure and its impact on the passivation quality on c-Si solar cells
期刊论文
OAI收割
SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2021, 卷号: 223
作者:
Lu, Linna
;
Zeng, Yuheng
;
Liao, Mingdun
;
Zheng, Jingming
;
Lin, Yiran
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Comparison of different types of interfacial oxides on hole-selective p(+)-poly-Si passivated contacts for high-efficiency c-Si solar cells
期刊论文
OAI收割
SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2020, 卷号: 210
作者:
Guo, Xueqi
;
Liao, Mingdun
;
Rui, Zhe
;
Yang, Qing
;
Wang, Zhixue
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Fabrication and characterisation of polysilicon-based clamped-clamped filter
期刊论文
OAI收割
key engineering materials, 2011, 卷号: 483, 页码: 112-116
Zhao, Yongmei
;
Ning, Jin
;
Han, Guowei
;
Si, Chaowei
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An Effective Approach for Restraining Galvanic Corrosion of Polycrystalline Silicon by Hydrofluoric-Acid-Based Solutions
期刊论文
OAI收割
journal of microelectromechanical systems, 2011, 卷号: 20, 期号: 2, 页码: 470-475
Liu YF
;
Xie J
;
Zhang ML
;
Yang JL
;
Yang FH
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The digital geometric phase technique applied to the deformation evaluation of MEMS devices
期刊论文
OAI收割
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2009, 卷号: 19, 期号: 1
Liu, ZW
;
Xie, HM
;
Gu, CZ
;
Meng, YG
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A non-isothermal model for squeeze film damping of rarefied gas
期刊论文
OAI收割
2009 IEEE SENSORS, VOLS 1-3, 2009, 页码: 213-216
Yang, H
;
Cheng, HT
;
Dai, B
;
Li, XX
;
Wang, YL
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Squeeze film air damping in MEMS
期刊论文
OAI收割
SENSORS AND ACTUATORS A-PHYSICAL, 2007, 卷号: 136, 期号: 1, 页码: 3-27
Bao, MH
;
Yang, H
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Fabrication of polysilicon thin film on glass with low-temperature UV-assisted crystallization (EI CONFERENCE)
会议论文
OAI收割
ICO20: Display Devices and Systems, August 21, 2005 - August 26, 2005, Changchun, China
Huang J. Y.
;
Ling Z. H.
;
Jing H.
;
Fu G. Z.
;
Zhao Y. H.
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Resonance enhancement of micromachined resonators with strong mechanical-coupling between two degrees of freedom
期刊论文
OAI收割
MICROELECTRONIC ENGINEERING, 2003, 卷号: 65, 期号: 1-2, 页码: 1-12
Li, XX
;
Ono, T
;
Lin, RM
;
Esashi, M
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