中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
首页
机构
成果
学者
登录
注册
登陆
×
验证码:
换一张
忘记密码?
记住我
×
校外用户登录
CAS IR Grid
机构
上海微系统与信息技... [12]
采集方式
OAI收割 [12]
内容类型
期刊论文 [12]
发表日期
2011 [2]
2010 [5]
2009 [3]
2008 [2]
学科主题
Electroche... [3]
Engineerin... [3]
Chemistry;... [2]
Physics [2]
Engineerin... [1]
Science & ... [1]
更多
筛选
浏览/检索结果:
共12条,第1-10条
帮助
条数/页:
5
10
15
20
25
30
35
40
45
50
55
60
65
70
75
80
85
90
95
100
排序方式:
请选择
题名升序
题名降序
提交时间升序
提交时间降序
作者升序
作者降序
发表日期升序
发表日期降序
Fabrication of Direct Silicon Bonded Hybrid Orientation Substrate by Separation by Implanted Oxygen Layer Transfer and Oxide Dissolution Annealing
期刊论文
OAI收割
APPLIED PHYSICS EXPRESS, 2011, 卷号: 4, 期号: 3, 页码: 31301
Wei, X
;
Xue, ZY
;
Wu, AM(重点实验室)
;
Cao, GB
;
Zhang, B
;
Lin, CL(重点实验室)
;
Zhang, MA
;
Wang, X(重点实验室)
收藏
  |  
浏览/下载:14/0
  |  
提交时间:2013/05/10
Physics
Applied
Investigation of silicon on insulator fabricated by two-step O+ implantation
期刊论文
OAI收割
CHINESE SCIENCE BULLETIN, 2011, 卷号: 56, 页码: 444-448
Wei, X
;
Xue, ZY
;
Wu, AM(重点实验室)
;
Wang, X(重点实验室)
;
Li, XY
;
Ye, F
;
Chen, J
;
Chen, M
;
Zhang, B(重点实验室)
;
Lin, CL(重点实验室)
;
Zhang, MA
;
Wang, X(重点实验室)
收藏
  |  
浏览/下载:31/0
  |  
提交时间:2013/05/10
Multidisciplinary Sciences
Investigation on Silicon on Insulator Fabricated by Separation by Implanted Oxygen Layer Transfer
期刊论文
OAI收割
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2010, 卷号: 157, 期号: 1, 页码: H81-H85
Wei, X
;
Wu, AM(重点实验室)
;
Wang, X(重点实验室)
;
Li, XY
;
Ye, F
;
Chen, J
;
Chen, M
;
Zhang, B(重点实验室)
;
Lin, CL(重点实验室)
;
Zhang, M
;
Wang, X(重点实验室)
收藏
  |  
浏览/下载:18/0
  |  
提交时间:2013/05/10
Electrochemistry
Materials Science
Coatings & Films
Strain Stability and Carrier Mobility Enhancement in Strained Si on Relaxed SiGe-on-Insulator
期刊论文
OAI收割
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2010, 卷号: 157, 期号: 1, 页码: H104-H108
Ma, XB
;
Liu, WL
;
Liu, XY
;
Du, XF
;
song, zt(重点实验室)
;
Lin, CL
;
Chu, PK
收藏
  |  
浏览/下载:19/0
  |  
提交时间:2013/05/10
Electrochemistry
Materials Science
Coatings & Films
Modified postannealing of the Ge condensation process for better-strained Si material and devices
期刊论文
OAI收割
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2010, 卷号: 28, 期号: 5, 页码: 1020-1025
Liu, XY
;
Ma, XB
;
Du, XF
;
Liu, WL
;
song, zt(重点实验室)
;
Lin, CL
收藏
  |  
浏览/下载:11/0
  |  
提交时间:2013/05/10
Engineering
Physics
Electrical & Electronic
Nanoscience & Nanotechnology
Applied
Germanium surface hydrophilicity and low-temperature Ge layer transfer by Ge-SiO(2) bonding
期刊论文
OAI收割
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2010, 卷号: 28, 期号: 4, 页码: 769-774
Ma, XB
;
Liu, WL
;
Du, XF
;
Liu, XY
;
song, zt(重点实验室)
;
Lin, CL
;
Chu, PK
收藏
  |  
浏览/下载:13/0
  |  
提交时间:2013/05/10
Engineering
Physics
Electrical & Electronic
Nanoscience & Nanotechnology
Applied
Strain relaxation in nano-patterned strained-Si/SiGe heterostructure on insulator
期刊论文
OAI收割
APPLIED SURFACE SCIENCE, 2010, 卷号: 256, 期号: 11, 页码: 3499-3502
Liu, XY
;
Liu, WL
;
Ma, XB
;
Lv, SL
;
song, zt(重点实验室)
;
Lin, CL
收藏
  |  
浏览/下载:13/0
  |  
提交时间:2013/05/10
Chemistry
Materials Science
Physics
Physics
Physical
Coatings & Films
Applied
Condensed Matter
Fabrication of high Ge content SiGe-on-insulator with low dislocation density by modified Ge condensation
期刊论文
OAI收割
APPLIED SURFACE SCIENCE, 2009, 卷号: 255, 期号: 17, 页码: 7743-7748
Ma, XB
;
Liu, WL
;
Chen, C
;
Du, XF
;
Liu, XY
;
song, zt(重点实验室)
;
Lin, CL
收藏
  |  
浏览/下载:28/0
  |  
提交时间:2013/05/10
Chemistry
Materials Science
Physics
Physics
Physical
Coatings & Films
Applied
Condensed Matter
Enhanced surface blistering of germanium with B(+)/H(+) coimplantation
期刊论文
OAI收割
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2009, 卷号: 27, 期号: 3, 页码: 1063-1067
Ma, XB
;
Du, XF
;
Liu, WL
;
Chen, C
;
song, zt(重点实验室)
;
Lin, CL
收藏
  |  
浏览/下载:12/0
  |  
提交时间:2013/05/10
Engineering
Physics
Electrical & Electronic
Nanoscience & Nanotechnology
Applied
Study of the Ge Wafer Surface Hydrophilicity after Low-Temperature Plasma Activation
期刊论文
OAI收割
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2009, 卷号: 156, 期号: 5, 页码: H307-H310
Ma, XB
;
Chen, C
;
Liu, WL
;
Liu, XY
;
Du, XF
;
song, zt(重点实验室)
;
Lin, CL
收藏
  |  
浏览/下载:15/0
  |  
提交时间:2013/05/10
Electrochemistry
Materials Science
Coatings & Films