中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
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浏览/检索结果: 共12条,第1-10条 帮助

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Fabrication of Direct Silicon Bonded Hybrid Orientation Substrate by Separation by Implanted Oxygen Layer Transfer and Oxide Dissolution Annealing 期刊论文  OAI收割
APPLIED PHYSICS EXPRESS, 2011, 卷号: 4, 期号: 3, 页码: 31301
Wei, X; Xue, ZY; Wu, AM(重点实验室); Cao, GB; Zhang, B; Lin, CL(重点实验室); Zhang, MA; Wang, X(重点实验室)
收藏  |  浏览/下载:14/0  |  提交时间:2013/05/10
Investigation of silicon on insulator fabricated by two-step O+ implantation 期刊论文  OAI收割
CHINESE SCIENCE BULLETIN, 2011, 卷号: 56, 页码: 444-448
Wei, X; Xue, ZY; Wu, AM(重点实验室); Wang, X(重点实验室); Li, XY; Ye, F; Chen, J; Chen, M; Zhang, B(重点实验室); Lin, CL(重点实验室); Zhang, MA; Wang, X(重点实验室)
收藏  |  浏览/下载:31/0  |  提交时间:2013/05/10
Investigation on Silicon on Insulator Fabricated by Separation by Implanted Oxygen Layer Transfer 期刊论文  OAI收割
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2010, 卷号: 157, 期号: 1, 页码: H81-H85
Wei, X; Wu, AM(重点实验室); Wang, X(重点实验室); Li, XY; Ye, F; Chen, J; Chen, M; Zhang, B(重点实验室); Lin, CL(重点实验室); Zhang, M; Wang, X(重点实验室)
收藏  |  浏览/下载:18/0  |  提交时间:2013/05/10
Strain Stability and Carrier Mobility Enhancement in Strained Si on Relaxed SiGe-on-Insulator 期刊论文  OAI收割
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2010, 卷号: 157, 期号: 1, 页码: H104-H108
Ma, XB; Liu, WL; Liu, XY; Du, XF; song, zt(重点实验室); Lin, CL; Chu, PK
收藏  |  浏览/下载:19/0  |  提交时间:2013/05/10
Modified postannealing of the Ge condensation process for better-strained Si material and devices 期刊论文  OAI收割
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2010, 卷号: 28, 期号: 5, 页码: 1020-1025
Liu, XY; Ma, XB; Du, XF; Liu, WL; song, zt(重点实验室); Lin, CL
收藏  |  浏览/下载:11/0  |  提交时间:2013/05/10
Germanium surface hydrophilicity and low-temperature Ge layer transfer by Ge-SiO(2) bonding 期刊论文  OAI收割
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2010, 卷号: 28, 期号: 4, 页码: 769-774
Ma, XB; Liu, WL; Du, XF; Liu, XY; song, zt(重点实验室); Lin, CL; Chu, PK
收藏  |  浏览/下载:13/0  |  提交时间:2013/05/10
Strain relaxation in nano-patterned strained-Si/SiGe heterostructure on insulator 期刊论文  OAI收割
APPLIED SURFACE SCIENCE, 2010, 卷号: 256, 期号: 11, 页码: 3499-3502
Liu, XY; Liu, WL; Ma, XB; Lv, SL; song, zt(重点实验室); Lin, CL
收藏  |  浏览/下载:13/0  |  提交时间:2013/05/10
Fabrication of high Ge content SiGe-on-insulator with low dislocation density by modified Ge condensation 期刊论文  OAI收割
APPLIED SURFACE SCIENCE, 2009, 卷号: 255, 期号: 17, 页码: 7743-7748
Ma, XB; Liu, WL; Chen, C; Du, XF; Liu, XY; song, zt(重点实验室); Lin, CL
收藏  |  浏览/下载:28/0  |  提交时间:2013/05/10
Enhanced surface blistering of germanium with B(+)/H(+) coimplantation 期刊论文  OAI收割
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2009, 卷号: 27, 期号: 3, 页码: 1063-1067
Ma, XB; Du, XF; Liu, WL; Chen, C; song, zt(重点实验室); Lin, CL
收藏  |  浏览/下载:12/0  |  提交时间:2013/05/10
Study of the Ge Wafer Surface Hydrophilicity after Low-Temperature Plasma Activation 期刊论文  OAI收割
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2009, 卷号: 156, 期号: 5, 页码: H307-H310
Ma, XB; Chen, C; Liu, WL; Liu, XY; Du, XF; song, zt(重点实验室); Lin, CL
收藏  |  浏览/下载:15/0  |  提交时间:2013/05/10