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Chinese Academy of Sciences Institutional Repositories Grid
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CAS IR Grid
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近代物理研究所 [5]
上海微系统与信息技术... [4]
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期刊论文 [14]
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2014 [2]
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Lattice Defects and Exfoliation Efficiency of 6H-SiC via H-2(+) Implantation at Elevated Temperature
期刊论文
OAI收割
MATERIALS, 2020, 卷号: 13, 期号: 24
作者:
Wang, Tao
;
Yang, Zhen
;
Li, Bingsheng
;
Xu, Shuai
;
Liao, Qing
  |  
收藏
  |  
浏览/下载:8/0
  |  
提交时间:2021/12/01
SILICON-CARBIDE
ON-INSULATOR
HYDROGEN IMPLANTATION
SURFACE EXFOLIATION
BUBBLE FORMATION
ION-CUT
IRRADIATION
HELIUM
WAFERS
H+
Study on vacancy-type defects in SIMP steel induced by separate and sequential H and He ion implantation
期刊论文
OAI收割
JOURNAL OF NUCLEAR MATERIALS, 2019, 卷号: 520, 页码: 131-139
作者:
Zhang, Tongmin
;
Wang, Zhiguang
;
Cao, Xingzhong
;
Lu, Eryang
;
Jin, Shuoxue
  |  
收藏
  |  
浏览/下载:84/0
  |  
提交时间:2019/11/10
Helium/hydrogen implantation
Positron annihilation
Vacancy defects
SIMP steel
6H-SiC blistering efficiency as a function of the hydrogen implantation fluence
期刊论文
OAI收割
APPLIED SURFACE SCIENCE, 2019, 卷号: 466, 页码: 141-150
作者:
Daghbouj, N.
  |  
收藏
  |  
浏览/下载:49/0
  |  
提交时间:2019/03/27
Hydrogen implantation
6H-SiC
Smart-cut
Blistering
Strain
Effect of implantation temperature on exfoliation of H-2(+)-implanted Si
期刊论文
OAI收割
VACUUM, 2014, 卷号: 109, 页码: 1-7
作者:
Li, B. S.
;
Wang, Z. G.
;
Du, Y. Y.
;
Wei, K. F.
;
Yao, C. F.
  |  
收藏
  |  
浏览/下载:25/0
  |  
提交时间:2018/07/05
Hydrogen Implantation
Annealing
Exfoliation
Platelet
Microcrack
Effects of the surface oxide layer on platelet growth in H-2(+)-implanted Si
期刊论文
OAI收割
VACUUM, 2014, 卷号: 102, 页码: 5-11
作者:
Li, B. S.
;
Wang, Z. G.
  |  
收藏
  |  
浏览/下载:20/0
  |  
提交时间:2018/07/05
Hydrogen Implantation
Platelet
Microcrack
Annealing
Smart-cut
Implantation temperature and thermal annealing behavior in H-2(+)-implanted 6H-SiC
期刊论文
OAI收割
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2013, 卷号: 316, 页码: 239-244
作者:
Li, B. S.
;
Wang, Z. G.
;
Jin, J. F.
  |  
收藏
  |  
浏览/下载:30/0
  |  
提交时间:2018/07/05
6h-sic
Hydrogen Implantation
Hrxrd
Surface Morphology
Ion-cut
The use of nanocavities for the fabrication of ultrathin buried oxide layers
期刊论文
OAI收割
APPLIED PHYSICS LETTERS, 2009, 卷号: 94, 期号: 1, 页码: 11903-11903
Ou, X
;
Kogler, R
;
Mucklich, A
;
Skorupa, W
;
Moller, W
;
Wang, X
;
Vines, L
收藏
  |  
浏览/下载:26/0
  |  
提交时间:2012/03/24
ION-IMPLANTATION
SOI MOSFETS
SILICON
SI
HELIUM
SEPARATION
DEFECTS
TEMPERATURE
HYDROGEN
BUBBLES
Photoluminescence properties of c+ implanted epitaxial si annealed in hydrogen ambience
期刊论文
iSwitch采集
Rare metal materials and engineering, 2005, 卷号: 34, 期号: 2, 页码: 256-258
作者:
Wang, Q
;
Li, YG
;
Shi, LW
;
Xue, CS
收藏
  |  
浏览/下载:26/0
  |  
提交时间:2019/05/12
C plus implantation
Annealing in hydrogen ambience
Chemical etching
Nanometer silicon with embedded structure
Increased thickness of buried oxide layer of silicon on insulator in separation by implantation of oxygen with water plasma
期刊论文
OAI收割
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2002, 卷号: 20, 期号: 4, 页码: 1570-1573
Chen, J
;
Chen, M
;
Dong, YM
;
Wang, X
;
Zheng, ZH
;
Wang, X
收藏
  |  
浏览/下载:12/0
  |  
提交时间:2012/03/24
ION-IMPLANTATION
HIGH-TEMPERATURE
DIFFUSION
HYDROGEN
MECHANISM
OXIDATION
SIMOX
SIO2
H distribution and strain evolution in SiGe/Si heterostructure implanted by H dimers
期刊论文
OAI收割
INTERNATIONAL JOURNAL OF MODERN PHYSICS B, 2002, 卷号: 16, 期号: 28-29, 页码: 4199-4202
An, ZH
;
Men, CL
;
Liu, WL
;
Zhang, M
;
Wu, YJ
;
Xie, XY
;
Chu, PK
;
Lin, CL
收藏
  |  
浏览/下载:17/0
  |  
提交时间:2012/03/24
HYDROGEN IMPLANTATION
LAYER TRANSFER
SI
SILICON
FIELD