中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
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CAS IR Grid
机构
物理研究所 [5]
半导体研究所 [2]
上海微系统与信息技术... [1]
沈阳自动化研究所 [1]
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OAI收割 [9]
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期刊论文 [8]
会议论文 [1]
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2015 [1]
2012 [1]
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Physics [1]
半导体材料 [1]
半导体物理 [1]
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Scheduling method for single-arm multi-cluster tools with residency time constraints
会议论文
OAI收割
2015 IEEE International Conference on Cyber Technology in Automation, Control, and Intelligent Systems (CYBER), Shenyang, China, June 8-12, 2015
作者:
Hu JT(胡静涛)
收藏
  |  
浏览/下载:26/0
  |  
提交时间:2016/03/12
semiconductor manufacutory
multiple-cluster tools
residency time cosntraints
buffer/process mudules
single-arm robot
scheduling analysis
Reel-to-Reel Deposition of Reactively Sputtered LaZrO Buffer Layers on Textured NiW Tapes for YBaCuO Coated Conductors
期刊论文
OAI收割
JOURNAL OF SUPERCONDUCTIVITY AND NOVEL MAGNETISM, 2012, 卷号: 25, 期号: 4, 页码: 773-777
Fan, F
;
Lu, YM
;
Liu, ZY
;
Ying, LL
;
Cai, CB
收藏
  |  
浏览/下载:61/0
  |  
提交时间:2013/04/17
Coated conductors
Single buffer
Sputtering
Reel-to-reel
Metallic substrates
Biaxial texture
Ordered ultra thin ZnO films on metal substrate
期刊论文
OAI收割
APPLIED SURFACE SCIENCE, 2009, 卷号: 255, 期号: 22, 页码: 9015
Guo, DH
;
Xue, MS
;
Guo, QL
;
Wu, KH
;
Guo, JD
;
Wang, EG
收藏
  |  
浏览/下载:19/0
  |  
提交时间:2013/09/24
ENERGY-LOSS-SPECTROSCOPY
RESOLVED PHOTOEMISSION-SPECTROSCOPY
SINGLE-CRYSTALLINE ZNO
X-RAY PHOTOEMISSION
MGO BUFFER LAYER
ELECTRONIC-STRUCTURE
GROWTH
SURFACE
SAPPHIRE
ZINC
Atomistic study of GaN surface grown on Si(111)
期刊论文
OAI收割
APPLIED PHYSICS LETTERS, 2005, 卷号: 87, 期号: 3
Wang, ZT
;
Yamada-Takamura, Y
;
Fujikawa, Y
;
Sakurai, T
;
Xue, QK
收藏
  |  
浏览/下载:33/0
  |  
提交时间:2013/09/17
MOLECULAR-BEAM EPITAXY
SINGLE CRYSTALLINE GAN
INVERSION DOMAINS
GAN(000(1)OVER-BAR) SURFACE
HETEROEPITAXIAL GROWTH
INTERMEDIATE LAYER
BUFFER LAYER
POLARITY
RECONSTRUCTIONS
MORPHOLOGY
Determination of a misfit dislocation complex in SiGe/Si heterostructures by image deconvolution technique in HREM
期刊论文
OAI收割
ULTRAMICROSCOPY, 2004, 卷号: 98, 期号: 2-4, 页码: 259
Wang, D
;
Zou, J
;
He, WZ
;
Chen, H
;
Li, FH
;
Kawasaki, K
;
Oikawa, T
收藏
  |  
浏览/下载:21/0
  |  
提交时间:2013/09/17
RESOLUTION ELECTRON-MICROSCOPY
SINGLE HETEROSTRUCTURES
FOCUS-VARIATION
BUFFER LAYER
RECONSTRUCTION
DENSITY
STRAIN
SI
Polarity dependence of hexagonal GaN films on two opposite c faces of Al2O3 substrate
期刊论文
OAI收割
APPLIED PHYSICS LETTERS, 2001, 卷号: 78, 期号: 25, 页码: 3974
Han, PD
;
Wang, ZG
;
Duan, XF
;
Zhang, Z
收藏
  |  
浏览/下载:20/0
  |  
提交时间:2013/09/24
MOLECULAR-BEAM EPITAXY
SURFACE POLARITY
SINGLE-CRYSTALS
BUFFER LAYER
GROWN GAN
DEPOSITION
MORPHOLOGY
QUALITY
ZNO
Polarity dependence of hexagonal GaN films on two opposite c faces of Al2O3 substrate
期刊论文
OAI收割
applied physics letters, 2001, 卷号: 78, 期号: 25, 页码: 3974-3976
作者:
Han PD
收藏
  |  
浏览/下载:85/9
  |  
提交时间:2010/08/12
MOLECULAR-BEAM EPITAXY
SURFACE POLARITY
SINGLE-CRYSTALS
BUFFER LAYER
GROWN GAN
DEPOSITION
MORPHOLOGY
QUALITY
ZNO
The growth and characterization of GaN grown on an Al2O3 coated (001)Si substrate by metalorganic vapor phase epitaxy
期刊论文
OAI收割
JOURNAL OF CRYSTAL GROWTH, 1998, 卷号: 193, 期号: 4, 页码: 484
Wang, LS
;
Liu, XL
;
Zan, YD
;
Wang, D
;
Lu, DC
;
Wang, ZG
;
Wang, YT
;
Cheng, LS
;
Zhang, Z
收藏
  |  
浏览/下载:29/0
  |  
提交时间:2013/09/23
MOLECULAR-BEAM EPITAXY
SINGLE CRYSTALLINE GAN
HIGH-QUALITY GAN
INTERMEDIATE LAYER
BUFFER LAYERS
SI
FILMS
ALN
DEPOSITION
SAPPHIRE
The growth and characterization of GaN grown on an Al2O3 coated (001)Si substrate by metalorganic vapor phase epitaxy
期刊论文
OAI收割
journal of crystal growth, 1998, 卷号: 193, 期号: 4, 页码: 484-490
Wang LS
;
Liu XL
;
Zan YD
;
Wang D
;
Lu DC
;
Wang ZG
;
Wang YT
;
Cheng LS
;
Zhang Z
收藏
  |  
浏览/下载:59/0
  |  
提交时间:2010/08/12
GaN
MOVPE growth
Al2O3 coated Si substrate
crystal structure
photoluminescence spectrum
SINGLE CRYSTALLINE GAN
HIGH-QUALITY GAN
INTERMEDIATE LAYER
BUFFER LAYERS
SI
FILMS
ALN
DEPOSITION
SAPPHIRE
MOLECULAR-BEAM EPITAXY