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半导体研究所 [3]
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Defect-Related Etch Pits on Crystals and Their Utilization
期刊论文
OAI收割
CRYSTALS, 2022, 卷号: 12, 期号: 11, 页码: 20
作者:
Lu, Dongzhu
;
Jiang, Quantong
;
Ma, Xiumin
;
Zhang, Qichao
;
Fu, Xiaole
  |  
收藏
  |  
浏览/下载:35/0
  |  
提交时间:2023/01/04
etch pit
crystal
dislocation
orientation
defects
Tuning mechanical and corrosion performance of SiOC glass coatings prepared by thermal MOCVD
期刊论文
OAI收割
JOURNAL OF NON-CRYSTALLINE SOLIDS, 2022, 卷号: 579, 页码: 7
作者:
Liu, Housheng
;
Tariq, Naeem ul Haq
;
Jing, Weichen
;
Cui, Xinyu
;
Tang, Mingqiang
  |  
收藏
  |  
浏览/下载:26/0
  |  
提交时间:2022/07/01
SiOC coatings
MOCVD
Hardness and modulus
HF etch resistance
Energy calibration of a CR-39 nuclear-track detector irradiated by charged particles
期刊论文
OAI收割
NUCLEAR SCIENCE AND TECHNIQUES, 2019, 卷号: 30, 期号: 6, 页码: —
作者:
Zhang, Y
;
Wang, HW
;
Ma, YG
;
Liu, LX
;
Cao, XG
  |  
收藏
  |  
浏览/下载:111/0
  |  
提交时间:2019/12/30
BULK ETCH RATE
Characterization of a Free-Standing Membrane Supported Superconducting Ti Transition Edge Sensor
期刊论文
OAI收割
IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY, 2017, 卷号: 27, 期号: 4, 页码: 6
作者:
Zhang, Wen
;
Miao, Wei
;
Wang, Zheng
;
Liu, Dong
;
Zhong, Jia-Qiang
  |  
收藏
  |  
浏览/下载:45/0
  |  
提交时间:2019/04/08
Superconducting transition edge sensor
thermal conductance
response time
noise equivalent power
KOH wet etch
Two-step etch method to improve the filtering performance of nuclear track membrane
会议论文
OAI收割
作者:
Wang Yang
;
Qu Hua
;
Mo Dan
;
Xiong, L
;
Jiao, Q
  |  
收藏
  |  
浏览/下载:25/0
  |  
提交时间:2018/08/20
Nuclear track membrane
Two-step etch method
Double-cone shape
Flux comparison
Filtering performance
Two-step etch method to improve the filtering performance of nuclear track membrane
会议论文
OAI收割
作者:
Wang Yang
;
Qu Hua
;
Mo Dan
;
Xiong, L
;
Jiao, Q
  |  
收藏
  |  
浏览/下载:33/0
  |  
提交时间:2018/08/20
Nuclear track membrane
Two-step etch method
Double-cone shape
Flux comparison
Filtering performance
Preparation of silicon nanowires by in situ doping and their electrical properties
期刊论文
OAI收割
COLLOIDS AND SURFACES A-PHYSICOCHEMICAL AND ENGINEERING ASPECTS, 2014, 卷号: 450, 页码: 156-160
作者:
Wang, Jindong
;
He, Gen
;
Qin, Jinwen
;
Li, Lidong
;
Guo, Xuefeng
  |  
收藏
  |  
浏览/下载:23/0
  |  
提交时间:2019/04/09
Nanowire
Silicon
Afm
Wet Chemical Etch
Electrical Measurement
Dopant
Observation of etch pits in Fe-36wt%Ni Invar alloy
期刊论文
OAI收割
International Journal of Minerals Metallurgy and Materials, 2014, 卷号: 21, 期号: 7, 页码: 682-686
D. Z. Lu
;
M. J. Wu
收藏
  |  
浏览/下载:26/0
  |  
提交时间:2015/01/14
Invar alloy
dislocations
etch pit technique
alloying elements
dislocation density
gan
reduction
Nano-scale gap filling and mechanism of deposit-etch-deposit process for phase-change material
期刊论文
OAI收割
CHINESE PHYSICS B, 2012, 卷号: 21, 期号: 11, 页码: 115203
Ren, WC
;
Liu, B
;
Song, ZT
;
Xiang, YH
;
Wang, ZT
;
Zhang, BC
;
Feng, SL
收藏
  |  
浏览/下载:23/0
  |  
提交时间:2013/04/23
deposit-etch-deposit process
single step deposit
gap filling
re-deposition
Fabrication of high-efficiency ultraviolet blazed gratings by use of direct Ar2-CHF3 ion-beam etching through a rectangular photoresist mask (EI CONFERENCE)
会议论文
OAI收割
International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies, May 24, 2011 - May 26, 2011, Beijing, China
Tan X.
收藏
  |  
浏览/下载:25/0
  |  
提交时间:2013/03/25
In ultraviolet spectroscopy
groove irregularity and surface roughness of nanometer magnitude can cause a significant loss of diffraction efficiency. Therefore
there is a constant need to improve the diffraction efficiency. A blazed grating can concentrate most of the light intensity into a desired diffraction order
it is important to control the groove shape precisely
so it is the optimum choice among gratings of different kinds of profile. As the operating wavelength of most UV spectral applications is less than 200 nm
especially the blaze angle and the apical angle. We have presented a direct shaping method to fabricate EUV blazed gratings by using an ion-beam mixture of Ar+ and CHF2 +to etch K9 glass with a rectangular photoresist mask. With this method
the required blaze angle is small
we have succeeded in fabricating well-shaped UV blazed gratings with a 1200 line/mm groove density and 8.54 blaze angles and 1200 line/mm groove density and 11.68 blaze angles
and the metrical efficiency is about 81% and 78%. The good performance of the gratings was verified by diffraction efficiency measurements. When one uses the etching model
the conditions on the ion-beam grazing incident angle and the CHF3partial pressure should be noted. Besides
since the etched groove shape depends on the aspect ratio of the photoresist mask ridge
if we wish to fabricate larger gratings with this method
we must improve the uniformity of the photoresist mask before ion-beam etching. 2011 Copyright Society of Photo-Optical Instrumentation Engineers (SPIE).