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CAS IR Grid
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近代物理研究所 [10]
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期刊论文 [15]
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The effect of cavities on recrystallization growth of high-fluence He implanted-SiC
期刊论文
OAI收割
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2021, 卷号: 509, 页码: 68-72
作者:
Zhang, Tongmin
;
He, Xiaoxun
;
Chen, Limin
;
Li, Jun
;
Liao, Qing
  |  
收藏
  |  
浏览/下载:101/0
  |  
提交时间:2022/01/07
He implantation
Recrystallization
Microstructure
6H-SiC
Lattice Defects and Exfoliation Efficiency of 6H-SiC via H-2(+) Implantation at Elevated Temperature
期刊论文
OAI收割
MATERIALS, 2020, 卷号: 13, 期号: 24, 页码: 13
作者:
Wang, Tao
;
Yang, Zhen
;
Li, Bingsheng
;
Xu, Shuai
;
Liao, Qing
  |  
收藏
  |  
浏览/下载:72/0
  |  
提交时间:2021/12/13
6H-SiC
H-2(+) implantation
exfoliation
microstructure
Lattice Defects and Exfoliation Efficiency of 6H-SiC via H-2(+) Implantation at Elevated Temperature
期刊论文
OAI收割
MATERIALS, 2020, 卷号: 13, 期号: 24
作者:
Wang, Tao
;
Yang, Zhen
;
Li, Bingsheng
;
Xu, Shuai
;
Liao, Qing
  |  
收藏
  |  
浏览/下载:12/0
  |  
提交时间:2021/12/01
SILICON-CARBIDE
ON-INSULATOR
HYDROGEN IMPLANTATION
SURFACE EXFOLIATION
BUBBLE FORMATION
ION-CUT
IRRADIATION
HELIUM
WAFERS
H+
Damage and recovery behavior of 4H-SiC implanted with He ions
期刊论文
OAI收割
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2019, 卷号: 449, 页码: 54-57
作者:
Zhang, Chonghong
;
Yang, Yitao
;
Su, Changhao
;
Ding, Zhaonan
;
Song, Yin
  |  
收藏
  |  
浏览/下载:116/0
  |  
提交时间:2019/11/10
4H-SiC
He ions implantation
Nanoindentation
Raman
Graphite
Thermal annealing
6H-SiC blistering efficiency as a function of the hydrogen implantation fluence
期刊论文
OAI收割
APPLIED SURFACE SCIENCE, 2019, 卷号: 466, 页码: 141-150
作者:
Daghbouj, N.
;
Li, B. S.
;
Karlik, M.
;
Declemy, A.
  |  
收藏
  |  
浏览/下载:51/0
  |  
提交时间:2019/03/27
Hydrogen implantation
6H-SiC
Smart-cut
Blistering
Strain
Study of surface exfoliation on 6H-SiC induced by H-2(+) implantation
期刊论文
OAI收割
PHYSICA B-CONDENSED MATTER, 2017, 卷号: 508, 页码: 104-111
作者:
Zhang, L.
;
Li, B. S.
  |  
收藏
  |  
浏览/下载:14/0
  |  
提交时间:2018/05/31
Smart-cut
H-2(+) implantation
Transmission electron microscopy
Exfoliation
Blisters
Effects of Implantation Sequence on the Micro-defects in H and O Implanted Silicon
期刊论文
OAI收割
JOURNAL OF ELECTRONIC MATERIALS, 2016, 卷号: 45, 期号: 10, 页码: 5064-5068
作者:
Wang, BY
;
Zhang P(张鹏)
;
Cao XZ(曹兴忠)
;
Wang BY(王宝义)
;
Wang, Z
  |  
收藏
  |  
浏览/下载:39/0
  |  
提交时间:2017/07/24
Platelet
cavity
H implantation
silicon
Structures and optical properties of H-2(+)-implanted GaN epi-layers
期刊论文
OAI收割
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2015, 卷号: 48
作者:
Li, B. S.
;
Wang, Z. G.
  |  
收藏
  |  
浏览/下载:36/0
  |  
提交时间:2018/07/05
Gan Epitaxial Films
H-2(+) Implantation
Implantation Damage
Cross-sectional Transmission Electron Microscopy
Dislocation Loops
Implantation temperature and thermal annealing behavior in H-2(+)-implanted 6H-SiC
期刊论文
OAI收割
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2013, 卷号: 316, 页码: 239-244
作者:
Li, B. S.
;
Wang, Z. G.
;
Jin, J. F.
  |  
收藏
  |  
浏览/下载:37/0
  |  
提交时间:2018/07/05
6h-sic
Hydrogen Implantation
Hrxrd
Surface Morphology
Ion-cut
The effects of Xe irradiation on He and H co-implanted Si
期刊论文
OAI收割
RADIATION EFFECTS AND DEFECTS IN SOLIDS, 2012, 卷号: 167, 期号: 3, 页码: 212-219
作者:
Zhang, CH
;
Li, BS
;
Yang, YT
  |  
收藏
  |  
浏览/下载:25/0
  |  
提交时间:2015/10/15
H and He co-implantation
Xe irradiation
platelet
strong electronic excitation