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上海微系统与信息技术... [7]
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期刊论文 [8]
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Finite-element study of strain field in strained-Si MOSFET
期刊论文
OAI收割
MICRON, 2009, 卷号: 40, 期号: 2, 页码: 274
Liu, HH
;
Duan, XF
;
Xu, QX
收藏
  |  
浏览/下载:26/0
  |  
提交时间:2013/09/17
BEAM ELECTRON-DIFFRACTION
HOLE MOBILITY ENHANCEMENT
ELASTIC RELAXATION
LAYER SUPERLATTICES
EFFECT TRANSISTORS
CMOS PERFORMANCE
SILICON
SPECIMENS
PMOSFETS
Finite-element study of strain field in strained-Si MOSFET
外文期刊
OAI收割
2009
作者:
Liu, HH
;
Xu, QX
;
Duan, XF
  |  
收藏
  |  
浏览/下载:22/0
  |  
提交时间:2010/11/26
Beam Electron-diffraction
Hole Mobility Enhancement
Elastic Relaxation
Layer Superlattices
Effect Transistors
Cmos Performance
Silicon
Specimens
Pmosfets
Fabrication of strained silicon on insulator by strain transfer process
期刊论文
OAI收割
APPLIED PHYSICS LETTERS, 2005, 卷号: 87, 期号: 5, 页码: 51921-51921
Jin, B
;
Wang, X
;
Chen, J
;
Cheng, XL
;
Chen, ZJ
收藏
  |  
浏览/下载:27/0
  |  
提交时间:2012/03/24
HOLE MOBILITY ENHANCEMENT
SI N-MOSFETS
LAYER TRANSFER
SUBSTRATE
ELECTRON
SI1-XGEX
Fabrication of SGOI material by oxidation of an epitaxial SiGe layer on an SOI wafer with H ions implantation
期刊论文
OAI收割
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2005, 卷号: 234, 期号: 3, 页码: 243-248
Cheng,XL
;
Chen,ZJ
;
Wang,YJ
;
Jin,B
;
Zhang,F
;
Zou,SC
收藏
  |  
浏览/下载:31/0
  |  
提交时间:2012/03/24
HOLE MOBILITY ENHANCEMENT
HIGH-GE FRACTION
STRAINED-SI
INSULATOR SUBSTRATE
N-MOSFETS
ELECTRON
ULTRATHIN
Fabrication and mechanism of relaxed SiGe-on-insulator by modified Ge condensation
期刊论文
OAI收割
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2005, 卷号: 23, 期号: 4, 页码: 1637-1640
Di, ZF
;
Zhang, M
;
Liu, WL
;
Luo, SH
;
Song, ZT
;
Lin, CL
;
Huang, AP
;
Chu, PK
收藏
  |  
浏览/下载:26/0
  |  
提交时间:2012/03/24
HOLE MOBILITY ENHANCEMENT
STRAINED-SI
OXIDATION BEHAVIOR
HIGH-PERFORMANCE
COMPLIANT OXIDE
N-MOSFETS
GERMANIUM
SUBSTRATE
ELECTRON
ISLANDS
Relaxed silicon-germanium-on-insulator fabricated by oxygen implantation and oxidation-enhanced annealing
期刊论文
OAI收割
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2005, 卷号: 20, 期号: 8, 页码: 770-774
Chen, ZJ
;
Zhang, F
;
Chen, J
;
Jin, B
;
Wang, YJ
;
Zhang, CS
;
Zhang, ZX
;
Wang, X
收藏
  |  
浏览/下载:21/0
  |  
提交时间:2012/03/24
HOLE MOBILITY ENHANCEMENT
RAMAN-SCATTERING
BUFFER LAYERS
STRAINED-SI
SUBSTRATE
ELECTRON
MOSFETS
Oxygen segregation and Ge diffusion in annealed oxygen ion-implanted relaxed SiGe/Si heterostructures
期刊论文
OAI收割
JOURNAL OF ELECTRONIC MATERIALS, 2004, 卷号: 33, 期号: 3, 页码: 207-212
An, ZH
;
Zhang, M
;
Fu, RKY
;
Chu, PK
;
Lin, CL
收藏
  |  
浏览/下载:21/0
  |  
提交时间:2012/03/24
HOLE MOBILITY ENHANCEMENT
STRAIN RELAXATION
ELECTRON
MECHANISM
HYDROGEN
MOSFETS
LAYER
Fabrication of thick, high-quality strained SiGe layer on ultra-thin silicon-on-insulator and modeling of film strain
期刊论文
OAI收割
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2004, 卷号: 7, 期号: 4-6, 页码: 393-397
Di, ZF
;
Zhang, M
;
Liu, WL
;
Lin, CL
;
Chu, PK
收藏
  |  
浏览/下载:29/0
  |  
提交时间:2012/03/24
COMPLIANT SUBSTRATE
RAMAN-SCATTERING
INFRARED DETECTORS
ALLOYS
TRANSISTORS
MOBILITY
GROWTH
HOLE
ENHANCEMENT
TRANSPORT
Relaxed silicon-germanium-on-insulator substrates by oxygen implantation into pseudomorphic silicon germanium/silicon heterostructure
期刊论文
OAI收割
APPLIED PHYSICS LETTERS, 2003, 卷号: 82, 期号: 15, 页码: 2452-2454
An, ZH
;
Wu, YJ
;
Zhang, M
;
Di, ZF
;
Lin, CL
;
Fu, RKY
;
Chen, P
;
Chu, PK
;
Cheung, WY
;
Wong, SP
收藏
  |  
浏览/下载:22/0
  |  
提交时间:2012/03/24
HOLE MOBILITY ENHANCEMENT
STRAINED-SI
ELECTRON
MOSFETS
LAYER